Structure with embedded memory device and contact isolation scheme

ABSTRACT

The present disclosure provides a method of fabricating an integrated circuit in accordance with some embodiments. The method includes forming a source and a drain on a fin active region of a semiconductor substrate; depositing an interlayer dielectric (ILD) layer on the source and drain; patterning the ILD layer to form a first contact hole and a second contact hole aligning with the source and drain, respectively; forming a dielectric material layer in the first contact hole; and forming a first conductive feature and a second conductive feature in the first and second contact holes, respectively.

PRIORITY DATA

This application claims priority to U.S. Provisional Patent ApplicationSer. No. 62/592,810 filed Nov. 30, 2017, the entire disclosure of whichis hereby incorporated herein by reference.

BACKGROUND

In an integrated circuit, an integrated circuit pattern can be formed ona substrate using various fabrication technologies that includephotolithography patterning, etching, deposition and ion implantation.Thus formed integrated circuits include various devices, such asfield-effect transistor, diode, bipolar transistor, imaging sensor,light-emitting diode, memory cell, resistor, and capacitor, integratedtogether. A memory device may include a passive device, such as acapacitor or a resistor coupled with other devices, such as afield-effect transistor. In the existing technologies, a passive device,such as a resistor, is formed through various semiconductor technologiesthat include etching. Those technologies have limited and inaccuratecontrol to dimensions of the passive device, which causes highvariations of the device dimensions and the device performance as well.In some cases, the device parameters may run out of the specificationand fail the circuit. Furthermore, the existing methods are hard to beimplemented in the advanced technology nodes due to high processingvariation and small feature sizes. Especially, when the semiconductortechnologies move forward to advanced technology nodes with smallerfeature sizes, such as 7 nm or less, the misalignments have lesstolerance and may cause leakage, short, opening or other failure defectsor reliability issue. Therefore, the present disclosure provides astructure and a method making the same to address the above issues.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isemphasized that, in accordance with the standard practice in theindustry, various features are not drawn to scale. In fact, thedimensions of the various features may be arbitrarily increased orreduced for clarity of discussion.

FIG. 1A is a top view of a semiconductor device structure constructedaccording to various aspects of the present disclosure in oneembodiment.

FIGS. 1B and 1C are sectional views of the semiconductor structure ofFIG. 1A along the dashed lines AA′ and BB′ respectively, in accordancewith some embodiments.

FIG. 1D is a sectional view of the gate stack of the semiconductordevice structure in FIG. 1B constructed in accordance with someembodiments.

FIG. 2A is a flowchart of a method to form an integrated circuit (IC)structure in accordance with some embodiments.

FIG. 2B is a flowchart of the operation in the method of FIG. 2A inaccordance with some embodiments.

FIGS. 3A and 3B illustrate sectional views of an exemplary integratedcircuit structure at a fabrication stage, made by the method of FIG. 2A,according to various embodiments.

FIGS. 4, 5, 6, 7, and 8 illustrate sectional views of an exemplaryintegrated circuit structure during various fabrication stages, made bythe method of FIG. 2A, constructed in accordance with some embodiments.

FIG. 9A is a top view of a semiconductor device structure constructedaccording to various aspects of the present disclosure in oneembodiment.

FIGS. 9B and 9C are sectional views of the semiconductor structure ofFIG. 9A along the dashed lines AA′ and BB′ respectively, in accordancewith some embodiments.

FIGS. 10A and 10B are flowcharts of respective operations in the methodof FIG. 2A in accordance with some embodiments.

FIGS. 11, 12, 13, and 14 illustrate sectional views of an exemplaryintegrated circuit structure during various fabrication stagesconstructed in accordance with some embodiments.

FIG. 15A is a top view of a semiconductor device structure constructedaccording to various aspects of the present disclosure in oneembodiment.

FIGS. 15B and 15C are sectional views of the semiconductor structure ofFIG. 15A along the dashed lines AA′ and BB′ respectively, in accordancewith some embodiments.

FIGS. 16A, 16B and 16C are flowcharts of an operation in the method ofFIG. 2A according to various embodiments.

FIGS. 17, 18, 19, 20, and 21 illustrate sectional views of an exemplaryintegrated circuit structure during various fabrication stagesconstructed in accordance with some embodiments.

FIG. 22A is a top view of a semiconductor device structure constructedaccording to various aspects of the present disclosure in oneembodiment.

FIGS. 22B and 22C are sectional views of the semiconductor structure ofFIG. 22A along the dashed lines AA′ and BB′ respectively, in accordancewith some embodiments.

FIG. 23 is a flowchart of an operation in the method of FIG. 2A inaccordance with some embodiments.

FIGS. 24, 25, 26, 27, 28, and 29 illustrate sectional views of anexemplary integrated circuit structure during various fabrication stagesconstructed in accordance with some embodiments.

FIG. 30A is a top view of a semiconductor device structure constructedaccording to various aspects of the present disclosure in oneembodiment.

FIGS. 30B and 30C are sectional views of the semiconductor structure ofFIG. 30A along the dashed lines AA′ and BB′ respectively, in accordancewith some embodiments.

FIG. 31 a flowchart of an operation in the method of FIG. 2A inaccordance with some embodiments.

FIGS. 32, 33, 34, 35, 36, 37, and 38 illustrate sectional views of anexemplary integrated circuit structure during various fabrication stagesconstructed in accordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the invention. Specificexamples of components and arrangements are described below to simplifythe present disclosure. These are, of course, merely examples and arenot intended to be limiting. For example, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures may be formed between the first and second features, such thatthe first and second features may not be in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed. It is to beunderstood that the following disclosure provides many differentembodiments, or examples, for implementing different features of variousembodiments. Specific examples of components and arrangements aredescribed below to simplify the present disclosure. These are, ofcourse, merely examples and are not intended to be limiting.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. For example, if the device in the figures is turned over,elements described as being “below” or “beneath” other elements orfeatures would then be oriented “above” the other elements or features.Thus, the exemplary term “below” can encompass both an orientation ofabove and below. The apparatus may be otherwise oriented (rotated 90degrees or at other orientations) and the spatially relative descriptorsused herein may likewise be interpreted accordingly.

FIG. 1A is a top view of a semiconductor structure (or a work piece) 100constructed according to various aspects of the present disclosure inone embodiment. FIG. 1B is a sectional view of the semiconductorstructure 100 along the dashed lines AA′ in accordance with someembodiments. FIG. 1C is a sectional view of the semiconductor structure100 along the dashed lines BB′ in accordance with some embodiments. Thesemiconductor structure 100 and the method making the same arecollectively described with reference to FIGS. 1A through 1C and otherfigures. In some embodiments, the semiconductor structure 100 includesfin active regions and includes fin field-effect transistors (FinFETs)formed thereon. In some embodiments, the semiconductor structure 100 mayinclude flat active regions and includes plain field-effect transistors(FETs) formed thereon. The semiconductor structure 100 includes a FETthat may be an n-type FET (nFET) or a p-type FET (pFET). Thesemiconductor structure 100 further includes a capacitor electricallyconnected to the FET, such as to the source of the FET. As an exampleonly for illustration but not limiting, the FET is an nFET. The FET andthe capacitor are connected and collectively function as a memorydevice, such as a resistive random-access memory (RRAM) or a dynamic RAM(DRAM). In some other examples, the memory device is a one-timeprogramming (OTP) memory (e.g., embedded OTP memory).

The semiconductor structure 100 includes a substrate 102. The substrate102 includes a bulk silicon substrate. Alternatively, the substrate 102may include an elementary semiconductor, such as silicon or germanium ina crystalline structure; a compound semiconductor, such as silicongermanium, silicon carbide, gallium arsenic, gallium phosphide, indiumphosphide, indium arsenide, and/or indium antimonide; or combinationsthereof. Possible substrates 102 also include a silicon-on-insulator(SOI) substrate. SOI substrates are fabricated using separation byimplantation of oxygen (SIMOX), wafer bonding, and/or other suitablemethods.

The substrate 102 also includes various isolation features, such asisolation features 104 formed on the substrate 102 and defining variousactive regions on the substrate 102, such as an active region 106. Theisolation feature 104 utilizes isolation technology, such as shallowtrench isolation (STI), to define and electrically isolate the variousactive regions. The isolation feature 104 includes silicon oxide,silicon nitride, silicon oxynitride, other suitable dielectricmaterials, or combinations thereof. The isolation feature 104 is formedby any suitable process. As one example, forming STI features includes alithography process to expose a portion of the substrate, etching atrench in the exposed portion of the substrate (for example, by using adry etching and/or wet etching), filling the trench (for example, byusing a chemical vapor deposition process) with one or more dielectricmaterials, and planarizing the substrate and removing excessive portionsof the dielectric material(s) by a polishing process, such as a chemicalmechanical polishing (CMP) process. In some examples, the filled trenchmay have a multi-layer structure, such as a thermal oxide liner layerand filling layer(s) of silicon nitride or silicon oxide.

The active region 106 is a region with semiconductor surface whereinvarious doped features are formed and configured to one or more device,such as a diode, a transistor, and/or other suitable devices. The activeregion may include a semiconductor material similar to that (such assilicon) of the bulk semiconductor material of the substrate 102 ordifferent semiconductor material, such as silicon germanium (SiGe),silicon carbide (SiC), or multiple semiconductor material layers (suchas alternative silicon and silicon germanium layers) formed on thesubstrate 102 by epitaxial growth, for performance enhancement, such asstrain effect to increase carrier mobility. In the present example, theactive region 106 has an elongated shape oriented in the X direction.

In the present embodiment, the active region 106 is three-dimensional,such as a fin active region extruding above the isolation feature 104.The fin active region is extruded from the substrate 102 and has athree-dimensional profile for more effective coupling between thechannel region (or simply referred to as channel) and the gate electrodeof a FET. The fin active region 106 may be formed by selective etchingto recess the isolation features 104, or selective epitaxial growth togrow active regions with a semiconductor same or different from that ofthe substrate 102, or a combination thereof. The fin active region 106is also simply referred to a fin 106.

The semiconductor substrate 102 further includes various doped features,such as n-type doped wells, p-type doped wells, source and drain, otherdoped features, or a combination thereof configured to form variousdevices or components of the devices. In one embodiment, thesemiconductor structure 100 includes a doped well 110 of a first-typedopant on the fin active region 106. The doped well 110 may extend tothe regions underlying the isolation features 104 by diffusion. As notedabove only for illustration, the FET formed on the fin 106 is an nFET.In this case, the doped well 110 is doped with a p-type dopant(therefore referred to as p-well). The dopant (such as boron) in thedoped well 110 may be introduced to the fin 106 by ion implantation orother suitable technology. For example, the doped well 110 may be formedby a procedure that includes forming a patterned mask with an opening onthe substrate 102 wherein the opening defines the region for the dopedwell 110; and performing an ion implantation to introduce a p-typedopant (such as boron) into the fin 106 using the patterned mask as animplantation mask. The patterned mask may be a patterned resist layerformed by lithography or a pattern hard mask formed by deposition,lithography process and etching. In an alternative embodiment, the FETon the fin 106 is a pFET and the doped well 110 may be doped with ann-type dopant, such as phosphorous.

The semiconductor structure 100 further includes a gate stack 114disposed in the fin 106 and having an elongated shape oriented in the Ydirection. The Y direction is orthogonal to the X direction, both X andY directions defining the top surface of the substrate 102. The topsurface has a normal direction along the Z direction, which isorthogonal to both X and Y directions. The gate stack 114 includes agate dielectric layer 116 and a gate electrode 120 formed on the gatedielectric layer. The gate stack 114 may have a height ranging between10 nm and 20 nm according to some examples.

The gate dielectric layer 116 includes a dielectric material, such assilicon oxide. In other embodiments, the gate dielectric layeralternatively or additionally includes other suitable dielectricmaterials for circuit performance and manufacturing integration. Forexample, the gate dielectric layer 116 includes a high k dielectricmaterial layer, such as metal oxide, metal nitride or metal oxynitride.In various examples, the high k dielectric material layer includes metaloxide: ZrO2, Al2O3, and HfO2, formed by a suitable method, such as metalorganic chemical vapor deposition (MOCVD), physical vapor deposition(PVD), atomic layer deposition (ALD), or molecular beam epitaxy (MBE).The gate dielectric layer may further include an interfacial layerinterposed between the semiconductor substrate 102 and the high kdielectric material. In some embodiments, the interfacial layer includessilicon oxide formed by ALD, thermal oxidation or ultraviolet-OzoneOxidation.

The gate electrode 120 includes metal, such as aluminum, copper,tungsten, metal silicide, metal alloy, doped poly-silicon, other properconductive material or a combination thereof. The gate electrode 120 mayinclude multiple conductive films designed such as a capping layer, awork function metal layer, a blocking layer and a filling metal layer(such as aluminum or tungsten). The multiple conductive films aredesigned for work function matching to nFET (or pFET). In someembodiments, the gate electrode 120 for nFET includes a work functionmetal with a composition designed with a work function equal 4.2 eV orless. In other cases the gate electrode for pFET includes a workfunction metal with a composition designed with a work function equal5.2 eV or greater. For examples, the work function metal layer for nFETincludes tantalum, titanium aluminum, titanium aluminum nitride or acombination thereof. In other examples, the work function metal layerfor pFET includes titanium nitride, tantalum nitride or a combinationthereof.

The gate stack 114 may further include gate spacer 122 formed on thesidewalls of the gate electrode 120. The spacer 122 includes siliconoxide, silicon nitride, silicon oxynitride, other suitable dielectricmaterial or a combination thereof. The spacer 122 may have a multilayerstructure and may be formed by depositing dielectric material and thenanisotropic etching, such as plasma etching.

The gate stack 114 is formed by a proper procedure, such as a gate-lastprocess, wherein a dummy gate is first formed, and then is replaced by ametal gate after the formation of the source and drain. Alternatively,the gate stack is formed by high-k-last process, wherein the both gatedielectric material layer and the gate electrode are replaced by high-kdielectric material and metal, respectively, after the formation of thesource and drain. The gate stack 114 may have different structure due togate materials and formation. One exemplary gate stack 114 isillustrated in FIG. 1D in a sectional view. The method making the sameis further described in according to some embodiments. In the presentembodiment, the gate stack 114 is a metal gate formed by a procedure: adummy gate stack is formed on the fin; source and drain are formed; anILD is deposited on the source and drain; then the dummy gate stack isremoved, resulting in a gate trench; metal gate materials are depositedin the gate trench; and a CMP process is applied to remove the excessivegate materials. In the present embodiment illustrated in FIG. 1D, thegate stack 114 includes the gate dielectric layer 116 having a high-kdielectric material and being U-shaped. The gate electrode 120 includesmultiple layers, such as 120A, 120B and 120C. In furtherance of theembodiments, the gate electrode layer 120A is a capping layer to preventinter-diffusion and other integration consideration; the gate electrodelayer 120B is a metal layer to tune work function (also referred to as awork-function metal layer); and the gate electrode layer 120C is afilling metal, such as tungsten, copper, aluminum, copper aluminumalloy, or other low resistivity metal.

The semiconductor structure 100 includes a channel region 124 defined onthe fin 106 and underlying the gate stack 114. The channel 124 providesa current path between the source and the drain. The channel 124 has asame type of dopant to that of the doped well 110 (p-well in the presentexample) but with a greater doping concentration, depending on theapplication and device specification. The channel 124 may be tuned byion implantation with a suitable dopant concentration for properthreshold voltage and other parameters.

The semiconductor structure 100 includes source/drain (S/D) features (orsimply referred to as source and drain) formed on the fin 106 onopposite sides of the channel 124 (and the gate stack 114 as well). TheS/D features are doped with a second-type dopant opposite to thefirst-type dopant. In this case, the S/D features doped with an n-typedopant (such as phosphorous). The S/D features may be formed by ionimplantation and/or diffusion. Other processing steps may be furtherincluded to form the S/D features. For example, a rapid thermalannealing (RTA) process may be used to activate the implanted dopant.The S/D features may have different doping profiles formed by multi-stepimplantation. For example, additional doping features such as lightdoped drain (LDD) or double diffused drain (DDD) may be included. Also,the S/D features may have different structures, such as raised,recessed, or strained. For example, the formation of the S/D featuresmay include: etching to recess the source and drain regions; selectiveepitaxial growth to form epitaxial S/D features with in-situ doping; andan annealing for activation. Thus formed S/D features are epitaxial S/Dfeatures with straining effect for enhanced carrier mobility and deviceperformance. The S/D features may be formed by one or more selectiveepitaxial growth, whereby silicon (Si) features, silicon germanium(SiGe) features, silicon carbide (SiC) features, and/or other suitablesemiconductor features are grown in a crystalline state on the finswithin the source and drain regions. For the convenience of thefollowing description, the S/D features are referred to as drain 126 andsource 128, respectively.

The source, 128, the drain 126, the channel 124 and the gate stack 114are configured to form a FET. In the present embodiment, the FET is annFET, which is only for illustration not limiting. In alternativeembodiment, the FET is a pFET.

The semiconductor structure 100 further includes an interlayerdielectric (ILD) layer 130 disposed on the substrate 102. The ILD layer130 includes one or more dielectric material to provide isolationfunctions to various device components. The ILD layer 130 includes adielectric material, such as silicon oxide, a low-k dielectric material,other suitable dielectric material, or a combination thereof. In someexamples, the low-k dielectric material includes fluorinated silicaglass (FSG), carbon doped silicon oxide, Xerogel, Aerogel, amorphousfluorinated carbon, Parylene, BCB (bis-benzocyclobutenes), polyimide,and/or other suitable dielectric materials with dielectric constantsubstantially less than that of the thermal silicon oxide. The formationof the ILD layer 130 includes deposition and CMP, for examples. Thedeposition may include spin-on coating, CVD, other suitable depositiontechnology or a combination thereof.

The semiconductor structure 100 also includes a capping layer 132disposed on the gate stack 114 and the ILD layer 130. The capping layer132 covers the gate stack 114 and provides protection to the gate stack114, such as protecting from being oxidized or etch damaged duringsubsequent processes. The capping layer 132 may serve other functions,such as etch-stop. The capping layer 132 provides some advantages overthe existing methods, such as deposition without etching to eliminatecorresponding etching damage. The capping layer 132 includes adielectric material, such as silicon oxide, silicon nitride, siliconoxynitride, other suitable dielectric material or a combination thereof.The capping layer 132 may be formed by any suitable depositiontechnology, such as CVD, or atomic layer deposition (ALD). In thepresent embodiment, the capping layer 132 is a planar layer with thebottom surface being coplanar with the top surface of the gate stack 114and the ILD layer 130. In some examples, the capping layer 132 has athickness ranging between 0.5 nm and 5 nm. In other examples, thecapping layer 132 has a thickness ranging between 2 nm and 4 nm.

The semiconductor structure 100 further includes a second ILD layer 134disposed on the capping layer 132. The second ILD layer 134 is similarto the ILD layer 130 in terms of composition and formation. Forexamples, the second ILD layer 134 may include low-k dielectric materialand may be formed by deposition and CMP.

The semiconductor structure 100 further includes contact features, suchas the first contact feature 136 and a second contact feature 138 toprovide electrical connection. The first contact feature 136 and asecond contact feature 138 include conductive material(s), such as metalor metal alloy, and are formed in the ILD layers (130 and 134). Thefirst contact feature 136 is aligned with the drain 126 and is directlylanding on the drain 126. The second contact feature 138 is aligned onthe source 128 without direct contacting the source. Each of the firstand second contact features includes a glue layer 140 and a fillingmetal 142. The glue layer 140 provides various functions, such asadhesion and inter-diffusion prevention. In the present embodiment, theglue layer 140 includes titanium and titanium nitride. The glue layer140 may be deposited by physical vapor deposition (PVD), ALD, othersuitable deposition or a combination thereof. The filling metal 142includes tungsten, copper, aluminum, copper aluminum alloy, othersuitable conductive material, or a combination thereof. The fillingmetal 142 is deposited by any suitable technology, such as CVD, PVD,plating, or a combination thereof.

The semiconductor structure 100 further includes another dielectricmaterial layer 146 surrounding the first and second contact features.The dielectric material layer 146 includes a suitable dielectricmaterial same or different from that of the capping layer 132. In someexamples, the dielectric material layer 146 includes oxide, nitride, orcarbide, such as silicon oxide, silicon nitride, silicon oxynitride,silicon carbide, other suitable dielectric material or a combinationthereof. The dielectric material layer 146 may be deposited by CVD, ALDor other suitable technology. In some examples, the dielectric materiallayer 146 has a thickness ranging between 0.5 nm and 5 nm. In someexamples, the dielectric material layer 146 has a thickness rangingbetween 1 nm and 2 nm. Particularly, the thickness T of the dielectricmaterial layer 146 and the height H of the gate stack 114 has a ratioT/H ranging from 1/20 to 1/2 according to some examples.

Particularly, the dielectric material layer 146 extends between thesource 128 and the second contact feature 138, and isolates the source128 from the second contact feature 138. The extended portion of thedielectric material layer 146 interposed between the source 128 and thesecond contact feature 138 functions as a capacitor sandwiched betweenthe source 128 and the second contact feature 138. In some embodiments,the source 128, the second contact feature 138, and the extended portionof the dielectric material layer 146 functions as a capacitor, whereinthe second contact feature 138 and the source 128 function as twoelectrodes of the capacitor. The FET and the capacitor form a memorydevice, such as a RRAM or DRAM, or an eOTP.

The formation of the contact features includes patterning the ILD layersto form contact holes; depositing the dielectric material layer 146 inthe contact holes; selectively removing the portion of the dielectricmaterial layer 146 from the bottom surface of the contact hole alignedto the drain; depositing the glue layer 140; depositing the fillingmetal 142 on the glue layer in the contact holes; and performing a CMPprocess to remove excessive the filling metal 142 and the glue layer 140on the ILD layers. The selective removal of the portion of thedielectric material layer 146 on the bottom surface of the contact holecorresponding to the drain 126 may further include: forming a patternedmask to cover the contact hole to the source 128 and uncover the contacthole to the drain 126; performing an anisotropic etching process (suchas a dry etching process) to selective remove the bottom portion withinthe contact hole aligned to the drain; and removing the patterned masklayer. In one example, the dielectric material layer 146 is deposited byALD with precise controlling to the corresponding thickness.

The semiconductor structure 100 further includes a third contact feature148 aligned with the gate stack 114 and directly landing on the gatestack 114, such as landing on an extending portion of the gate stack 114on the isolation feature 104, as illustrated in FIGS. 1A and 1C. Thethird contact feature 148 may be formed by a similar procedure butindependent from the procedure to form the first and second contactfeatures.

The semiconductor structure 100 may include other features, such as aninterconnection structure that further includes metal lines frommultiple metal layers to provide horizontal electrical connections; andvias to provide vertical connections between metal lines in adjacentmetal layers.

By implementing the disclosed method and structure, the resistor (orcapacitor) is formed by deposition, and the resistance (or capacitance)is determined by the thickness of the dielectric material layer 146. Theresistance can be more precisely controlled since the thickness can beprecisely controlled by deposition. Furthermore, the process is easy tobe implemented and is more compatible with advanced technology nodes,such as 7 nm technology node.

FIG. 2A is a flowchart of the method 200 for making a semiconductorstructure, such as the semiconductor structure 100. The method 200 andthe semiconductor structure are collectively described with reference toFIG. 2A and other figures. However, the semiconductor structure 100 isonly one structure made by the method 200 according to some embodimentsand it is not limiting. As to be seen in following descriptions, othersemiconductor structures can also be made by the method 200. Since somedescriptions are provided with FIGS. 1A-1D, those languages will not berepeated below.

Referring to block 202 of FIG. 2A and FIG. 3A, the method 200 includesan operation to form isolation features 104 in the semiconductorsubstrate 102, thereby defining one or more active region 106. Theformation of the isolation features may include forming a patterned maskby lithography; etching the substrate 102 through the openings of thepatterned mask to form trenches; filling the trench with one or moredielectric material; and performing a CMP process. The patterned maskincludes openings to define the regions for the isolation features 104.The patterned mask may be a soft mask (such as a photoresist layer), ora hard mask (such as silicon oxide, silicon nitride or a combinationthereof). A patterned photoresist layer is formed by lithography processthat further includes spin-on coating, exposure, developing, and one ormore baking steps. The formation of the patterned hard mask may includedepositing a hard mask layer; forming a patterned resist layer by alithography process; etching the hard mask through the openings of thepatterned resist layer; and removing the patterned resist layer by wetstripping or plasma ashing.

In alternative embodiments, the active region 106 is a fin active regionwith three-dimensional profile. In this case, the operation 202 furtherincludes forming a fin active region 106 extruded above the isolationfeature 104, as illustrated in FIG. 3B. The semiconductor structure 100may include multiple fin active regions, being collectively referred toas a fin structure. In some embodiments, the fin structure may be formedby selective etching to recess the isolation feature 104. In someembodiments, the fin structure may be formed by selective epitaxialgrowth to the active regions with one or more semiconductor material. Inyet some embodiments, the fin structure may be formed by a hybridprocedure having both selective etching to recess and selectiveepitaxial growth. The fin structure may have elongated shape orientedalong the X direction. The epitaxial grown semiconductor material mayinclude silicon, germanium, silicon germanium, silicon carbide or othersuitable semiconductor material. The selective etching process mayinclude wet etching, dry etching, other suitable etching or acombination thereof. In the following figures, the semiconductorstructure 100 shows a planar active region 106 but it is understood thatthe active region 106 can be a fin active region.

The method 200 may include an operation to form doped wells, such as adoped well 110 on the fin 106, as illustrated in FIG. 3A (and FIG. 3B).In the present embodiment, the doped well 110 is a p-type doped well(p-well) where p-type dopant (such as boron) is introduced into the fin106 by a suitable technology, such as ion implantation.

Referring to block 204 of FIG. 2A and FIG. 3A, the method 200 proceedsto an operation to form the gate stack 114 on the fin 106. The formationof the gate stack 114 includes deposition and patterning, such asdepositing a gate dielectric layer, depositing gate electrodematerial(s), and patterning the deposited gate materials to form thegate stack. In some embodiments, the operation 204 forms a dummy gatestack including polysilicon, and the dummy gate stack is replaced by ametal gate stack after the formation of the source and drain. Forexample, the dummy gate stack is formed by depositions and patterningprocess, wherein the patterning process further includes lithographyprocess and etching. In one embodiment, the procedure to form the dummygate stack includes: forming a thermal oxide layer on the fins bythermal oxidation; depositing a poly-silicon layer by CVD; forming apatterned mask layer by photolithography process; and performing anetching process to the deposited dummy gate materials. The patternedmask layer includes an opening to define the region for the dummy gatestack. The patterned mask layer may be a soft mask (such as aphotoresist layer), or a hard mask (such as silicon oxide, siliconnitride or a combination thereof) formed with a similar processes toform the hard mask for the isolation features 104 during the operation202. The operation 204 also includes forming gate spacer 122 onsidewalls of the gate stack. The gate spacer 122 includes one or moredielectric material, such as silicon oxide, silicon nitride, or acombination thereof. The formation of the gate spacer 122 may includedepositing one or more dielectric material layer on the dummy gatestack; and performing an anisotropic etching process to the dielectricmaterial layer. In some examples, the anisotropic etching processincludes dry etching using a suitable etchant, such asfluorine-containing gas or chlorine-containing gas.

Referring to block 206 of FIG. 2A and FIG. 3A, the method 200 includesan operation to form the source 128 and the drain 126 on the fin 106.The source and drain are interposed by the channel 124 underlying thegate stack. In the present embodiment, the source and drain are dopedwith an n-type dopant, such as phosphorous. The channel 124 is dopedwith a p-type dopant, such as boron. The source and drain may be formedby multiple steps.

In some embodiments, the source and drain are epitaxial source anddrain. The epitaxial source and drain may be formed by selectiveepitaxial growth for straining effect with enhanced carrier mobility anddevice performance. The source and drain are formed by one or moreepitaxial growth steps, whereby silicon (Si) features, silicon germanium(SiGe) features, silicon carbide (SiC) features, and/or other suitablesemiconductor features are grown in a crystalline state on the finwithin the source and drain regions (such as defined by a patterned hardmask). In an alternative embodiment, an etching process is applied torecess portions of the active region 106 within the source and drainregions before the epitaxy growth. The etching process may also removeany dielectric material disposed on the source/drain regions, such asduring the formation of the gate sidewall features. Suitable epitaxygrowth process includes CVD deposition technologies (e.g., vapor-phaseepitaxy (VPE) and/or ultra-high vacuum CVD (UHV-CVD), molecular beamepitaxy, and/or other suitable processes. The source and drain may bein-situ doped during the epitaxy process by including dopant-containinggas in the epitaxial precursor, such as phosphorus or arsenic-containinggas (or alternatively p-type dopant-containing gas, (e.g., boron orBF₂-containing gas) if the FET is a pFET). If the source and drain arenot in-situ doped, an implantation process may be performed to introducethe corresponding dopant into the source and drain. In some otherembodiments, the raised source and drain are formed by epitaxial growthwith more than one semiconductor material layers. In some examples, asilicon layer or a silicon carbide is epitaxially grown on the fin 106to form the source and drain of an nFET, or alternatively a silicongermanium layer is epitaxially grown on the fin 106 to form the sourceand drain of a pFET.

Referring to block 208 of FIG. 2A and FIG. 3A, the method 200 includesan operation to form an inter-layer dielectric (ILD) layer 130 on thesemiconductor structure 100. The ILD layer 130 includes one or moredielectric material to provide isolation functions to various devicecomponents. The ILD layer 130 includes a dielectric material, such assilicon oxide, a low-k dielectric material, other suitable dielectricmaterial, or a combination thereof. In some examples, the low-kdielectric material includes fluorinated silica glass (FSG), carbondoped silicon oxide, Xerogel, Aerogel, amorphous fluorinated carbon,Parylene, BCB (bis-benzocyclobutenes), polyimide, and/or other suitabledielectric materials with dielectric constant less than that of thethermal silicon oxide. The formation of the ILD layer 130 includesdeposition and CMP, for examples. The deposition may include spin-oncoating, CVD, other suitable deposition technology or a combinationthereof.

In the present embodiment, the operation 204 forms the dummy gate stackand is replaced by a metal gate stack after the operation 208. Referringto block 210 of FIG. 2A and FIG. 3A, the method 200 includes anoperation to form the metal gate stack 114 to replace the dummy gatestack. The formation of the metal gate stacks includes etching,deposition and CMP. The metal gate stack 114 includes the gatedielectric layer 116 and the gate electrode 120 with a structureillustrated in FIG. 1D, according to some examples.

Referring to block 211 of FIG. 2A and FIG. 4, the method 200 may includean operation to form a capping layer 132 on the gate stack 114 and theILD layer 130. The capping layer 132 includes a suitable dielectricmaterial, such as silicon oxide, silicon nitride or silicon oxynitride.The capping layer 132 may be formed by a suitable deposition technology,such as CVD, or ALD. In the present embodiment, the capping layer 132 isa planar layer with the bottom surface being coplanar with the topsurface of the gate stack 114 and the ILD layer 130. In some examples,the capping layer 132 has a thickness ranging between 0.5 nm and 5 nm.In other examples, the capping layer 132 has a thickness ranging between2 nm and 4 nm.

Referring to FIG. 4, the method 200 may include an operation to formanother ILD layer 134 on the capping layer 132. The ILD layer 134 issimilar to the ILD layer 130 in terms of composition and formation.

Referring to block 212 of FIG. 2A and FIG. 5, the method 200 includes anoperation to form contact holes 150 and 152 in the ILD layers,particularly, in the ILD layer 130, the capping layer 132 and the ILDlayer 134. The contact holes 150 and 152 are aligned with and expose thedrain 126 and the source 128, respectively. The formation of the contactholes includes forming a patterned mask using lithography process; andetching through the openings of the patterned mask. The etching mayinclude one or more etching steps with suitable etchants to etchrespective material layers. In the present embodiment, the etchingprocess may include dry etch, wet etch, or a combination thereof. Thepatterned mask can be a soft mask (such as photoresist) or a hard mask(such as a dielectric material layer with enough etching selectivity).

The method 200 proceeds to an operation 214 to form a dielectricmaterial layer 146 in the contact holes. In the present embodiment, thedielectric material layer 146 is formed on sidewalls and bottom surfaceof the contact hole 152 for the source 128 but only formed on thesidewalls of the contact hole 150 of the drain 126, in which the bottomsurface of the contact hole 150 is free of the dielectric material layer146. The operation 214 is further described with reference to FIG. 2B asa flowchart of the operation 214 that includes multiple sub-operations.

Referring to block 218 of FIG. 2B and FIG. 6, the method 214 includes anoperation to deposit the dielectric material layer 146 in the contactholes and on the ILD layer 134 by a suitable deposition technology, suchas ALD or CVD. The dielectric material layer 146 includes a suitabledielectric material, such as silicon oxide, silicon nitride, siliconoxynitride, silicon carbide, or a combination thereof. The deposition iscontrolled to have a proper thickness. The dielectric material layer 146is formed on sidewalls and bottom surfaces of the contact holes 150 and152. In some examples, the dielectric material layer 146 has a thicknessranging between 0.5 nm and 5 nm. In some examples, the dielectricmaterial layer 146 has a thickness ranging between 1 nm and 2 nm.

Referring to block 220 of FIG. 2B and FIG. 6, the method 214 includes anoperation to form a patterned mask (soft mask or hard mask) 162 to coverthe second contact hole 152 and uncover the first contact hole 150.

Referring to block 222 of FIG. 2B and FIG. 7, the method 214 includes anoperation to perform an anisotropic etching process, such as dryetching, to remove the bottom portion of the dielectric material layer146 in the first contact hole 150 using the patterned mask 162 as anetching mask. The etching process may also remove the portions of thedielectric material layer 146 on the ILD layer 134. The patterned mask162 may be removed after the anisotropic etching process.

Referring back to block 216 of FIG. 2A and FIG. 8, the method 200includes an operation to form contact features 136 and 138 in thecontact holes 150 and 152, respectively. The formation of the contactfeatures includes depositing a glue layer 140 in the contact holes byALD, PVD or a combination thereof; depositing the conductive material142 to fill the contact holes by PVD, plating, ALD, or a combinationthereof; and performing a CMP process to remove the conductive materialon the ILD layer 134. The glue layer 140 includes a titanium film and atitanium nitride film in the present examples. The conductive material142 includes tungsten, copper, aluminum, aluminum copper alloy, or acombination thereof, according to some examples.

The contact feature 148 to the gate stack 114 is also formed in aseparate process. For example, the formation of the contact feature 148includes: forming a patterned mask with an opening to the gate stack114; etching the ILD to form a contact hole aligned to the gate stack;depositing a glue layer; depositing the conductive material to fill thecontact hole; and performing a CMP process.

FIGS. 9A-9C provides a semiconductor structure 900 formed by the method200 according to some other embodiments. FIG. 9A is a top view of asemiconductor structure 900 constructed according to various aspects ofthe present disclosure in one embodiment. FIG. 9B is a sectional view ofthe semiconductor structure 900 along the dashed lines AA′ in accordancewith some embodiments. FIG. 9C is a sectional view of the semiconductorstructure 900 along the dashed lines BB′ in accordance with someembodiments. The semiconductor structure 900 is similar to thesemiconductor structure 100. The descriptions of the similar featuresare not repeated. In addition, the second contact feature 902 in thesemiconductor structure 900 is aligned with the source 128 and islanding on a portion (referred as 130A) of the ILD layer 130, asillustrated in FIG. 9B. The source 128 is separated and isolated fromthe contact feature 902 by the portion 130A of the ILD layer 130. Theportion 130A of the ILD layer 130 underlying the second contact feature902 functions as a capacitor (collectively with the second contactfeature 902 and the source 128). The FET and the capacitor are connectedtogether and form a memory device, such as a RRAM, a DRAM, or an eOPT.Various features are formed by the method 200 of FIG. 2, as illustratedin FIGS. 11 through 14 at different fabrication stages. For example, themethod 200 includes an operation 202 to form the isolation feature 104;an operation 206 to form source and drain; an operation 210 to form ametal gate stack; an operation 212 to form the contact holes; anoperation 214 to form the dielectric material layer 146; and so on. Thesimilar languages are not repeated here. Particularly, the operation 212to form the contact holes and the operation 214 to form the dielectricmaterial layer 146 are described in details with reference to FIGS. 10Aand 10B.

In the present embodiment, the first contact feature 136 and the secondcontact hole 902 of the semiconductor structure 900 are formed inseparate procedures. In furtherance of the embodiment, the secondcontact feature 902 is formed in a same procedure to form the gatecontact feature 148.

Referring to FIG. 10A and FIG. 13, the method 212 includes an operation1002 to form a first contact hole 150 by a similar procedure to form thecontact hole 150 of FIG. 5. For example, the operation 1002 includesforming a patterned mask and etching with the patterned mask as anetching mask. Particularly, the etching process is controlled to etchthrough the first ILD layer 130 such that the drain 126 is exposedwithin the first contact hole 150.

The method 212 also includes an operation 1004 to form a second contacthole 1302 by another procedure that collectively forms the contact hole148 of the gate stack 114. The gate contact feature 148 and the contactfeature 902 are collectively formed by a same operation 1004 while thecontact feature 136 is formed by another operation 1002.

The operation 1004 also includes forming a patterned mask with openingsthat defines regions for contact holes; and performing an etchingprocess to the ILD layers to form the corresponding contact holesaligned to the source 128 and the gate stack 114. The etching process iscontrolled to etch through the second ILD layer 134 and the cappinglayer 132 so that the gate stack 114 is exposed within the correspondingcontact hole (not shown here). Furthermore, the etching process iscontrolled not to etch through the first ILD layer 130 so that a portionof the ILD layer 130 remains in the second contact hole 1302 with adesired thickness. In some embodiments, the etching process includesmultiple etching steps with respective etchants. For example, a firstetching step is applied to etch the second ILD layer 134 and stops onthe capping layer 132; a second etching step is applied to etch thecapping layer 132 and stops on the gate stack 114; and a third etchingstep is applied to selectively etch the first ILD layer 130. In theadvanced technology nodes, due to the height difference between the gatestack and S/D feature, the gate contacts are formed separately from theformation of the S/S features. In the method 212, the second contactfeature 902 to the source 128 is grouped with the gate contacts withoutusing an additional photomask and a lithography process, leading to thereduced manufacturing cost.

Referring to FIGS. 10B and 13, the operation 214 of the method 200 toform the dielectric material layer 146 is only applied to the firstcontact hole 150 in the procedure to form the first contact feature 136aligned to the drain 126. As noted above, the first contact hole 150 isformed by the operation 1002 that further includes forming a patternedmask and etching. After the operation 1002, the operation 214 continuesusing the same patterned mask to form the dielectric material layer 146in the first contact hole 150. Especially, the operation 214 includes asub-operation 1006 to deposit the dielectric material layer 146 in thefirst contact hole 150; and a sub-operation 1008 to perform ananisotropic etching process to remove the dielectric material layer 146from the bottom surface of the first contact hole 150 so that the drain126 is exposed within the contact hole 150, as illustrated in FIG. 13.Thereafter, the contact features 136, 902 and 148 are formed by theoperation 216 as illustrated in FIG. 14.

FIGS. 15A-15C provides a semiconductor structure 1500 formed by themethod 200 according to some other embodiments. FIG. 15A is a top viewof a semiconductor structure 1500 constructed according to variousaspects of the present disclosure in one embodiment. FIG. 15B is asectional view of the semiconductor structure 1500 along the dashedlines AA′ in accordance with some embodiments. FIG. 15C is a sectionalview of the semiconductor structure 1500 along the dashed lines BB′ inaccordance with some embodiments. The semiconductor structure 1500 issimilar to the semiconductor structure 100. The descriptions of thesimilar features are not repeated. In addition, the second contactfeature 1502 in the semiconductor structure 1500 is aligned with thesource 128 and is landing on a resistive feature (or a dielectricfeature) 1504. The source 128 is separated and isolated from the contactfeature 1502 by the resistive feature 1504. The FET and the resistivefeature 1504 form a memory device, such as eOPT (or alternatively aRRAM). In some embodiments, the resistive feature 1504 is different fromthe dielectric material layer 146 in composition. Various features areformed by the method 200, as illustrated in FIGS. 17 through 21. Forexample, the method 200 includes an operation 202 to form the isolationfeature 104; an operation 206 to form source and drain; an operation 210to form a metal gate stack 114; an operation 212 to form the contactholes; an operation 214 to form the dielectric material layer 146; andso on. The similar languages are not repeated here. Particularly, theoperation (or method) 214 to form the dielectric material layer 146includes forming the resistive feature 1504 and is described in detailswith reference to FIG. 16A.

Referring to a block 1602 of FIG. 16A and FIG. 20, the method 214includes an operation to deposit the dielectric material layer 146 inthe first contact hole 150 and the second contact hole 152.

Referring to a block 1604 of FIG. 16A and FIG. 20, the method 214includes an operation to perform an anisotropic etching process toremove the bottom portions of the dielectric material layer 146 in thecontact holes.

Referring to a block 1606 of FIG. 16A and FIG. 20, the method 214includes an operation to form a patterned mask to uncover the secondcontact hole 152 and cover the first contact hole 150.

Referring to a block 1608 of FIG. 16A and FIG. 20, the method 214includes an operation to deposit a second dielectric material layer (ora resistive material layer) 1504 in the second contact hole 152. Thesecond dielectric material layer 1504 includes any dielectric materialdifferent from the first dielectric material layer 146 and may includesilicon oxide, silicon nitride, silicon oxynitride, high-k dielectricmaterial (such as metal oxide, metal nitride, or metal oxynitride), or acombination thereof. The deposition process may include CVD, ALD, orother suitable deposition technology. The deposition process iscontrolled to deposit the second dielectric material layer 1504 with adesired thickness.

Referring to a block 1610 of FIG. 16A and FIG. 20, the method 214includes an operation to perform an anisotropic etching process toremove the second dielectric material layer 1504 from the sidewalls ofthe second contact hole 152, resulting in a dielectric feature (stilllabeled with 1504) in the second contact hole 152. Thereafter, thecontact features including 136, 1502 and 148 by the operation 216 in therespective contact holes.

In an alternative embodiment, the method 214 to form the same structureis provided in FIG. 16B and is described in details.

Referring to FIG. 16B and FIG. 20, the method 214 includes an operation1602 to deposit the a second dielectric material layer 146 in the firstcontact hole 150 and the second contact hole 152; an operation 1604 toperform an anisotropic etching process to remove the bottom portions ofthe dielectric material layer 146 in the contact holes; and an operation1606 to form a patterned mask to uncover the second contact hole 152 andcover the first contact hole 150, similar to the correspondingoperations in FIG. 16A.

Referring to a block 1612 of FIG. 16B and FIG. 20, the method 214includes an operation to deposit a second dielectric material layer 1504to fill in the second contact hole 152. The second dielectric materiallayer 1504 includes any dielectric material different from the firstdielectric material layer 146 and may include silicon oxide, siliconnitride, silicon oxynitride, high-k dielectric material (such as metaloxide, metal nitride, or metal oxynitride), or a combination thereof.The deposition process may include CVD, ALD, spin-on coating, or othersuitable deposition technology. The deposition process fills the secondcontact hole 152.

Referring to a block 1614 of FIG. 16B and FIG. 20, the method 214includes an operation to perform a CMP process to remove the seconddielectric material layer 1504 from the ILD layer 134 and planarize thetop surface.

Referring to a block 1616 of FIG. 16B and FIG. 20, the method 214includes an operation to perform an etching process to recess the seconddielectric material layer 1504 in the second contact hole 152 to adesired thickness, resulting in the dielectric feature 1504 in thesecond contact hole 152.

In another alternative embodiment, the method 214 to form the samestructure is provided in FIG. 16C and is described below in details.

Referring to FIG. 16C and FIG. 20, the method 214 includes an operation1602 to deposit the dielectric material layer 146 in the first contacthole 150 and the second contact hole 152; an operation 1604 to performan anisotropic etching process to remove the bottom portions of thedielectric material layer 146 in the contact holes; and an operation1606 to form a patterned mask to uncover the second contact hole 152 andcover the first contact hole 150, similar to the correspondingoperations in FIG. 16A.

Referring to a block 1622 of FIG. 16C and FIG. 20, the method 214includes an operation to perform a bottom-up deposition process thatdeposits a second dielectric material layer 1504 on the bottom surfaceof the second contact hole 152, resulting a resistor 1504 in the secondcontact hole 152. A bottom-up metal deposition process fills an openingfrom bottom up and does not have the step coverage issue. A bottom-updeposition may include glass-cluster ion beams (GCIBs), initiated CVD(iCVD), cyclic-deposition-etch (CDE), or other suitable depositiontechnology. In some examples, the bottom-up deposition process is acyclic-deposition-etch process, where the deposition and etching aresimultaneously implemented so that the second dielectric material isonly deposited on the bottom surface since the deposited on thesidewalls of the second contact hole 152 is removed by etching.

FIGS. 22A-22C provides a semiconductor structure 2200 formed by themethod 200 according to some other embodiments. FIG. 22A is a top viewof a semiconductor structure 2200 constructed according to variousaspects of the present disclosure in one embodiment. FIG. 22B is asectional view of the semiconductor structure 2200 along the dashedlines AA′ in accordance with some embodiments. FIG. 22C is a sectionalview of the semiconductor structure 2200 along the dashed lines BB′ inaccordance with some embodiments. The semiconductor structure 2200 issimilar to the semiconductor structure 100. The descriptions of thesimilar features are not repeated. In addition, the second contactfeature 2202 in the semiconductor structure 2200 is aligned with thesource 128 and is directly landing on the source 128. The second contactfeature 2202 is substantially similar to the first contact feature 136in term of formation and structure. Various features are formed by themethod 200, as illustrated in FIGS. 24 through 29. For example, themethod 200 includes an operation 202 to form the isolation feature 104;an operation 206 to form source and drain; an operation 210 to form ametal gate stack 114; an operation 212 to form the contact holes; anoperation 214 to form the dielectric material layer 146; and so on. Thesimilar languages are not repeated here. Particularly, the operation (ormethod) 214 to form the dielectric material layer 146 is described indetails with reference to FIG. 23.

Referring to a block 218 of FIG. 23 and FIG. 27, the method 214 includesan operation to deposit the dielectric material layer 146 in the firstcontact hole 150 and the second contact hole 152.

Referring to a block 2302 of FIG. 23 and FIG. 28, the method 214includes an operation to perform an anisotropic etching process toremove the bottom portions of the dielectric material layer 146 fromboth the first and second contact holes. The anisotropic etching processalso removes the dielectric material layer 146 on the ILD layer 134.

FIGS. 30A-30C provides a semiconductor structure 3000 formed by themethod 200 according to some other embodiments. FIG. 30A is a top viewof a semiconductor structure 3000 constructed according to variousaspects of the present disclosure in one embodiment. FIG. 30B is asectional view of the semiconductor structure 3000 along the dashedlines AA′ in accordance with some embodiments. FIG. 30C is a sectionalview of the semiconductor structure 3000 along the dashed lines BB′ inaccordance with some embodiments. The semiconductor structure 3000 issimilar to the semiconductor structure 2200. The descriptions of thesimilar features are not repeated. However, the semiconductor structure3000 includes a silicide feature 3002 self-aligned to the gate stack114. The silicide feature 3002 protects the gate stack 114 from beingoxidized or etch damaged during subsequent processes, and also decreasesthe contact resistance since the gate electrode 120 includes someconductive materials with high-resistance (such as one illustrated inFIG. 1D). Various features are formed by the method 200, as illustratedin FIGS. 32 through 38. For example, the method 200 includes anoperation 202 to form the isolation feature 104; an operation 206 toform source and drain; an operation 210 to form a metal gate stack 114;an operation 212 to form the contact holes; an operation 214 to form thedielectric material layer 146; and an operation 216 to form the contactfeatures. The similar languages are not repeated here. Particularly, theoperation (or method) 210 to form the gate stack 114 is furtherdescribed in details with reference to FIG. 31.

Referring to a block 3102 of FIG. 31 and FIG. 32, the method 210includes an operation to remove the dummy gate stack by an etchingprocess, resulting in a gate trench.

Referring to a block 3104 of FIG. 31 and FIG. 32, the method 210includes an operation to form the metal gate stack 114 by a procedurethat further includes depositing various gate materials (such as high-kdielectric material, a work function metal and a filling metal) in thegate trench, as described in FIG. 1D.

Referring to a block 3106 of FIG. 31 and FIG. 32, the method 210includes an operation to deposit a silicon layer on the metal gate stackby a suitable method, such as CVD.

Referring to a block 3108 of FIG. 31 and FIG. 32, the method 210includes an operation to perform a thermal annealing process with asuitable temperature to react the silicon layer and the metal electrode120 to form a silicide feature 3002 directly on the gate electrode 120.In some embodiments, the silicide feature 3002 may include variousportions with different compositions since the gate electrode 120 mayinclude multiple metals or metal alloy.

Referring to a block 3110 of FIG. 31 and FIG. 32, the method 210 mayinclude an operation to perform an etching process to selectively removethe unreacted silicon from the gate stack 114 and the ILD layer 134. Theetching process may include wet etching, dry etching or a combinationthereof. In some examples, the etching process may uses am etchingsolution having a mixture of HNO₃, H₂O and HF to selectively removesilicon.

The method 200 and the semiconductor structure made by the method 200are provided in various embodiments. The method 200 may additionallyinclude other operations before, during or after the operationsdescribed above. For example, the method 200 may further include anoperation to form an interconnection structure to electrically couplevarious features, such as source, drain, gate stack, capacitor,resistor, or a combination thereof to form an integrated circuit. Insome example, the integrated circuit includes a memory device, such asan eOTP, a RRAM, a DRAM, or a combination thereof. In the abovedescriptions to some embodiments, the source 128 and the drain 126 aredescribed specifically and distinctively for better understanding of thestructure of the FET or a memory device with one of the S/D features isconnected to the aligned contact feature and another of the S/D featuresis separated from the aligned contact feature. However, the source andthe drain may be swapped according to other embodiments. In otherembodiments, the silicide feature 3002 self-aligned to the metal gatestack 114 in the semiconductor structure 300 may also be formed in thesemiconductor structure 100, the semiconductor structure 900, thesemiconductor structure 1500, and the semiconductor structure 2200.

The present disclosure provides a semiconductor structure and a methodmaking the same in various embodiments. The semiconductor structureincludes a FET with a dielectric material deposited in the contact holebefore the contact feature is formed therein. In some embodiments, thedielectric material layer is extended to between the contact feature andthe underlying source (or alternatively drain) and functions as acapacitor (or resistor). In some embodiments, the FET and capacitor forma memory device, such as a RRAM, a DRAM, or an eOTP. Furthermore, thedielectric material layer in the contact hole also provides isolationbetween the gate and the source/drain features with reduced leakage. Insome embodiments, the semiconductor structure includes a method to forma silicide feature on the metal gate stack and self-aligned with thegate electrode. By implementing the disclosed method in variousembodiments, some of advantages described below may present. However, itis understood that different embodiments disclosed herein offerdifferent advantages and that no particular advantage is necessarilyrequired in all embodiments. As one example, the dielectric layer 146 isformed in the contact hole by deposition, and the thickness of thedielectric material layer 146 is controlled by the deposition process.Therefore, the electric parameter of the dielectric material layer (suchas capacitance or resistance) can be more precisely controlled since thethickness can be more precisely controlled by deposition than etching.In another example, the dielectric material layer 146 is disposed on thesidewalls of the contact hole(s) and provides isolation between thesource/drain feature(s) and the gate stack, preventing from leaking.Furthermore, the process is easy to implement and is more compatiblewith advanced technology nodes, such as 7 nm technology node.

Thus, the present disclosure provides a method of fabricating anintegrated circuit in accordance with some embodiments. The methodincludes forming a source and a drain on a fin active region of asemiconductor substrate; depositing an interlayer dielectric (ILD) layeron the source and drain; patterning the ILD layer to form a firstcontact hole and a second contact hole aligning with the source anddrain, respectively; forming a dielectric material layer in the firstcontact hole; and forming a first conductive feature and a secondconductive feature in the first and second contact holes, respectively.

The present disclosure provides a method of fabricating an integratedcircuit in accordance with other embodiments. The method includesforming a metal gate stack on a fin active region of a semiconductorsubstrate; forming a source and a drain on the fin active region;forming a silicide layer self-aligned on the metal gate stack; formingan interlayer dielectric (ILD) layer on the source and drain; patterningthe ILD layer to form a first contact hole and a second contact holealigning with the source and drain, respectively; forming a dielectricmaterial layer in the first contact hole; and forming a first conductivefeature and a second conductive feature in the first and second contactholes, respectively.

The present disclosure provides an integrated circuit in accordance withsome embodiments. The IC structure includes a fin active region on asubstrate; a metal gate stack on the fin active region; a source and adrain on the fin active region, wherein the metal gate stack ininterposed between the source and drain; an interlayer dielectric (ILD)layer disposed on the source and the drain; a first conductive featureand a second conductive feature formed in the ILD layer and beingaligned on the source and the drain, respectively; and a dielectricmaterial layer surrounding the first and second conductive features. Thedielectric material layer continuously extends to a bottom surface ofthe first conductive feature and includes a portion interposing betweenthe first conductive feature and the source. The second conductivefeature directly contacts the drain.

The foregoing has outlined features of several embodiments so that thoseskilled in the art may better understand the detailed description thatfollows. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions andalterations herein without departing from the spirit and scope of thepresent disclosure.

1. (canceled)
 2. The method of claim 10, wherein the first conductivefeature is separated from the source by the dielectric material layer.3. The method of claim 2, wherein the forming of the dielectric materiallayer includes depositing the dielectric material layer directly on thesource within the first contact hole; and the forming of the first andsecond conductive features includes forming the first conductive featuredirectly on the dielectric material layer within the first contact hole.4. The method of claim 3, wherein the forming of the first and secondconductive features includes depositing a glue layer in the first andsecond contact holes; filling a conductive material on the glue layerwithin the first and second contact holes; and performing a chemicalmechanical polishing to remove excessive of the conductive material onthe ILD layer.
 5. The method of claim 4, further comprising forming agate stack on the fin active region and being interposed between thesource and drain, wherein the gate stack, the source and the drain areconfigured to a field-effect transistor.
 6. The method of claim 5,wherein the dielectric material layer includes one of silicon oxide,silicon nitride and silicon oxynitride.
 7. The method of claim 6,wherein the glue layer includes a titanium film and a titanium nitridefilm; and the conductive material includes one of tungsten, copper,aluminum, and a combination thereof.
 8. The method of claim 5, furthercomprising forming a dielectric capping layer on the gate stack and theILD layer before the depositing of the ILD layer on the source anddrain.
 9. (canceled)
 10. A method of fabricating an integrated circuit,comprising: forming a source and a drain on a fin active region of asemiconductor substrate; depositing an interlayer dielectric (ILD) layeron the source and drain; patterning the ILD layer to form a firstcontact hole and a second contact hole aligning with the source anddrain, respectively; forming a dielectric material layer in the firstcontact hole; forming a dielectric feature in the first contact hole,wherein the dielectric feature has a bottom surface directly contactingthe source and sidewalls directly contacting the first dielectricmaterial layer; and forming a first conductive feature and a secondconductive feature in the first and second contact holes, respectively,wherein the forming of the dielectric material layer in the firstcontact hole includes depositing the dielectric material layer in thefirst contact hole; and performing an anisotropic etching process toremove a bottom portion of the dielectric material layer within thefirst contact hole such that the source is exposed.
 11. The method ofclaim 10, wherein the forming of the dielectric feature in the firstcontact hole includes performing a bottom-up deposition, whereindielectric feature includes a dielectric material different from that ofthe dielectric material layer.
 12. The method of claim 10, furthercomprising forming a gate stack on the fin active region, wherein thegate stack includes a metal electrode; depositing a silicon layer on themetal electrode; annealing to react the silicon layer and a metal of themetal electrode, thereby forming a silicide layer on the metalelectrode; and etching to remove unreacted silicon.
 13. A method,comprising: forming a metal gate stack on a fin active region of asemiconductor substrate; forming a source and a drain on the fin activeregion, the source and drain being doped with a same type of dopant;forming a silicide layer self-aligned on the metal gate stack; formingan interlayer dielectric (ILD) layer on the source and the drain;patterning the ILD layer to form a first contact hole and a secondcontact hole aligning with the source and drain, respectively; forming adielectric material layer in the first contact hole; and forming a firstconductive feature and a second conductive feature in the first andsecond contact holes, respectively, wherein the first conductive featureis separated from the source by the dielectric material layer and thesecond conductive feature directly contacts the drain.
 14. The method ofclaim 13, wherein the forming of the dielectric material layer in thefirst contact hole includes depositing the dielectric material layerdirectly on the source within the first contact hole; the forming of thefirst and second conductive features includes forming the firstconductive feature on the dielectric material layer within the firstcontact hole; and the first conductive feature is separated from thesource by the dielectric material layer.
 15. The method of claim 13,wherein the forming of the dielectric material layer in the firstcontact hole includes depositing the dielectric material layer in thefirst and second contact hole; and removing portions of the dielectricmaterial layers from bottom surfaces of the first and second contactholes.
 16. The method of claim 15, further comprising forming aresistive material layer in the first contact hole, wherein theresistive material layer is a dielectric material different from thedielectric material layer in composition; the resistive material layeris surrounded by the dielectric material layer and is directly landingon the source; and the first conductive feature is directly landing onthe resistive material layer.
 17. The method of claim 15, furthercomprising: forming a patterned mask layer on the dielectric materiallayer to cover the first contact hole; and performing an etching processto remove a bottom portion of the dielectric material layer in thesecond contact hole.
 18. The method of claim 13, wherein the forming ofthe first and second conductive features includes depositing a gluelayer in the first and second contact holes; filling a conductivematerial on the glue layer within the first and second contact holes;and performing a chemical mechanical polishing to remove excessiveportions of the conductive material on the ILD layer.
 19. The method ofclaim 13, wherein the forming of the silicide layer self-aligned on themetal gate stack includes depositing a silicon layer on the metal gatestack; annealing to react the silicon layer and the metal gate stack,thereby forming a silicide layer on the metal gate stack; and etching toremove unreacted silicon.
 20. (canceled)
 21. A method of fabricating anintegrated circuit, comprising: forming a source and a drain on a finactive region of a semiconductor substrate; depositing an interlayerdielectric (ILD) layer on the source and drain; patterning the ILD layerto form a through hole to expose the drain; patterning the ILD to form arecess hole vertically aligning with the source and with a bottomportion of the ILD remained within the recess hole; and depositing toform a first conductive feature in the recess hole and a secondconductive feature in the through hole, wherein the first conductivefeature is separated from the source by the bottom portion of the ILDand the second conductive feature directly contacts the drain.
 22. Themethod of claim 21, further comprising forming a gate stack on asemiconductor substrate, wherein the gate stack spans from the source tothe drain, the source, drain and gate stack constitute portions of afield-effect transistor.
 23. The method of claim 21, wherein the formingof the source and drain includes forming the source and drain both beingdoped with a same type of dopant.